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Features
1) Media resistive pressure sensor die
2) 0 to 1 bar range (14.5 PSI)
3) Output span 110 mV @ 5 V
4) Linearity 0.15%
5) Pads on one side
6) Die size 1.79×1.35 mm
7) High Reliability and stability
8) Low Cost

Applications
1) Harsh environments
2) Absolute pressure sensor systems

Description
The MS7201-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7201-A2 is suitable for media-resistive applications.