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Features
1) Media resistive pressure sensor die
2) 0 to 12 bar range (174 PSI)
3) High linearity (0.05% typical)
4) Absolute sensor of 1.63×1.95 mm
5) High Reliability
6) Low Cost

Applications
1) Braking systems
2) Tire pressure
3) Engine Control
4) Diving Computers

Description
The MS7212A is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex? cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled Pyrex? is bonded on the backside. As the pressure port consists of Pyrex? and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.